The three main principles involved in mainstream gas mass flow meters and mass flow controllers - Kiel Planck
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The three main principles involved in mainstream gas mass flow meters and mass flow controllers

The three main principles involved in mainstream gas mass flow meters and mass flow controllers

1. Thermal Mass Principle (Most widely adopted, over 90% standard MFCs)

Divided into two types:

(1) Capillary laminar thermal type (traditional industrial MFC)

Gas splits into a main channel and a tiny bypass capillary. Two platinum coils wrap around the capillary: the upstream coil heats the gas, while the downstream coil detects temperature. Heat carried away by flowing gas creates a temperature difference proportional to mass flow. Readings are barely affected by gas temperature and pressure fluctuations.
  • Pros: Wide measuring range, stable accuracy, fast response; standard for semiconductors, photovoltaics and labs.
  • Cons: Capillary easily clogged by dust or oil; high cost for high-flow models.

(2) MEMS chip thermal type

Integrated heating and temperature-sensing resistors on a silicon MEMS chip with micro flow channels. Compact and low-cost, mainly for low-flow scenarios and portable equipment.

2. Coriolis Mass Principle

Gas passes through a vibrating bent measuring tube. Moving gas generates Coriolis force, producing a phase shift between tube sensors. The phase difference directly reflects mass flow rate without temperature/pressure compensation.
  • Pros: True direct mass measurement, compatible with corrosive high-purity gases, high pressure resistance, suitable for large flow rates.
  • Cons: Bulky, expensive, poor accuracy under ultra-low flow; rarely made into small-range MFCs, mostly used for large-bore gas mass flow meters.

3. Laminar Differential Pressure Principle

Based on Poiseuille’s law: under full laminar flow, pressure drop across a laminar element has a linear relationship with gas mass flow. A high-precision differential pressure sensor converts pressure signals into mass flow values.
  • Pros: Robust structure, high temperature resistance, dust tolerance, cost-effective for large flow measurement.
  • Cons: Strict laminar flow requirement; low accuracy under low pressure and tiny flow rates, applied to industrial purging and exhaust gas measurement.

Application Summary

  1. Thermal MFC: Standard for low & medium flow semiconductor, coating and laboratory processes
  2. Coriolis meter: High-precision large-flow measurement of rare or corrosive specialty gases
  3. Laminar differential pressure meter: Heavy industrial large-flow, high-temperature crude process gas measurement
 
The three main principles involved in mainstream gas mass flow meters and mass flow controllers - Kiel Planck
The three main principles involved in mainstream gas mass flow meters and mass flow controllers - Kiel Planck

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The three main principles involved in mainstream gas mass flow meters and mass flow controllers - Kiel Planck
The three main principles involved in mainstream gas mass flow meters and mass flow controllers - Kiel Planck

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